Tantalum nitride (TaN) is an inorganic chemical compound. It is sometimes used to create barrier or "glue" layers between copper, or other conductive metals, and dielectric insulator films such as thermal oxides. These films are deposited on top of silicon wafers during the manufacture of integrated circuits, to create thin film surface mount resistors and has other electronic applications.

1 materials used to make accurate sheet resistance, tantalum nitride resistance can resist the erosion of water vapor. As a super hard material additives, can be prepared pure five tantalum chloride: for spraying, increase the transformer, integrated circuits, diodes, electrical stability.